AOI-W1009-AL是针对晶圆表面缺陷检测的精密设备,采用机器视觉检测。根据工业相机成像的图形结果进行缺陷特征识别,并通过特定算法对缺陷进行判断并分类,从而实现晶圆表面缺陷检测功能。
AOI-W1009-AL is a precision device dedicated to wafer surface defect inspection with machine vision technology. It identifies defect features from images captured by industrial cameras, and distinguishes and classifies defects via dedicated algorithms to accomplish wafer surface defect detection.