AOI-DF030 为奥创普科技针对激光芯片的外观检查所开发的四面体检测高精密机型，兼容CHIP/COC/COS/BAR/晶圆外观检查所开发的高精度机型， 以机器视觉检测为主， 能同时检测P/正面（金线面）、N/底面、AR和HR面四个面。

AOI-DF030 is a high-precision four-surface inspection model developed by AOI for the appearance inspection of laser chips, which is compatible with the high-precision models developed for CHIP/COC/COS/BAR/wafers appearance inspection, and focuses on the machine vision inspection, and is able to inspect the four surfaces, namely, P/front side (gold line surface), N/bottom side, AR, and HR surfaces, at the same time.

检测精度：30nm/pixel

Detection precision: 30nm/pixel

检测准确率：≥ 99.8%

Detection accuracy: ≥ 99.8%

检测缺陷种类：脏污、破损、解理纹、划痕、区域异色、图形异常、尺寸异常等外观瑕疵Detection of defect types：dirt, damage, cracks, scratches, regional discoloration, graphic abnormalities, size abnormalities, etc.